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Plasma processing device

Patent Granted distributor (30) includes a power supply waveguide extending in the width direction (D2) of waveguide slot antennas (10A to 10H) and an opening (12) formed in the wall of the power supply waveguide communicating an irradiation waveguide of the waveguide slot antennas (10A to 10H) with the power supply waveguide.

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