Substrate processing

Patent Granted A fluororesin tube is obtained by adding perfluoromonomer to PVDF as fluororesin and by executing a softening treatment and has flexibility and an oxygen transmission amount remarkably reduced. Further, by providing a nylon tube on an outer layer also, an oxygen transmission amount can be reduced. These tubes are used between a chemical solution or ultrapure water feeding apparatus and a chemical solution or ultrapure water utilizing apparatus such as a cleaning apparatus and a wet etching apparatus.