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Dielectric film

Patent Granted A dielectric film wherein N in the state of an Si3=N bonding is present in a concentration of 3 atomic % or more in the surface side of an oxide film and also is present in a concentration of 0. 1 atomic % or less in the interface side of the oxide film can achieve the prevention of the B diffusion and also the prevention of the deterioration of the NBTI resistance in combination.

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