Metal nano-ink

特許 権利維持 The metal nano-ink (100) is produced by injecting oxygen as oxygen nano-bubbles (125) or oxygen bubbles (121) into an organic solvent (105) before or after mixing of metal nano-particles (101) having a surface coated with a dispersant (102) into the organic solvent (105). Fine droplets of the metal nano-ink (100) are ejected onto an electrode in a semiconductor die and an electrode in a substrateto form bumps on the electrodes.