Plasma processing system

特許 権利維持 To provide a microwave transmission line which uses a coaxial tube. A plasma processing apparatus (10) splits a microwave, which is transmitted to a coaxial tube (600) from a microwave source (900) through a splitting waveguide tube (905), by a splitting plate (610) into a plurality of microwaves and transmits the microwaves to internal conductors (315a) of the coaxial tubes. The microwaves transmitted through the internal conductors (315a) of the coaxial tubes are outputted into a processing container (100) from dielectric plates (305) connected to the internal conductors (315a).