Feeder

特許 権利維持 By softening PVDF, which is a fluorinated resin, by adding a perfluoro monomer thereto, the oxygen permeation level can be remarkably lowered and a flexible fluorinated resin tube can be obtained. By providing a nylon tube as an outer layer, the oxygen permeation level can be lowered too. These tubes are employed between a feeder (111) for drug solution(s) or ultrapurified water and a washing device or a device (101) for utilizing drug solution(s) or ultrapurified water such as a wet etching device.