公式タイトルと情報はIP Exchange PlusとPremiumのユーザーのみが利用可能です。
特許 権利維持 Disclosed is a structural member for a plasma treatment system, which is excellent in film-forming properties, durability and reliability. The structural member comprises a substrate and a ceramic film provided on the substrate, wherein the ceramic film has a purity of 98% or higher.
追加情報の詳細を見るにはIP Exchange PlusまたはIP Exchange Premiumアカウントにアップグレードする必要があります
