Optical waveguide device

特許 権利維持 PROBLEM TO BE SOLVED: To provide a compact and high-response active optical waveguide device which is easily manufactured using a silicon fine wire waveguide. SOLUTION: The optical waveguide device is provided with; an input side silicon fine wire waveguide fixed on a substrate; an output side silicon fine wire waveguide fixed on a substrate; an intermediate silicon fine wire waveguide arranged by being supported with first and second supporting beams separated from the substrate, between the input side silicon fine wire waveguide and the output side silicon fine wire waveguide