Piezoelectric actuator

特許 権利維持 PROBLEM TO BE SOLVED: To provide a control method that can achieve high-speed operation while taking the non-linearity of a piezoelectric actuator into consideration. ; SOLUTION: Using a voltage V supplied to the piezoelectric actuator and induced electric charge "q" as inputs, displacement x and load F of the piezoelectric actuator are estimated and a voltage to be supplied is set up based on the displacement x and the load F.