Plasma generation device

特許 権利維持 PROBLEM TO BE SOLVED: To provide a device and a method of surely and simply generating plasma in a place separated from an electrode. ; SOLUTION: A tip of a first electrode 30 is inserted into one-side opening of a narrow tube 10 having a branched branch tube 11, and the other-side opening of the narrow tube 10 is connected to a gas flow generation member 80 through a joint part 70. A gas is injected into the narrow tube 10 from the gas flow generation member 80 to generate a gas flow in the narrow tube 10, and the gas flow reaches up to the first electrode 30.