Microwave waveguide probe

特許 係属中 PROBLEM TO BE SOLVED: To develop a microwave waveguide probe wherein a compound semiconductor is used for a substrate for achieving a microwave atomic force microscope. ; SOLUTION: In a probe 10, a cantilever portion 12 is bent by an interatomic force working between an explorer on the tip of a cantilever 12 and a sample 20. A bending amount is detected by a so-called optical lever system wherein laser light generated from a laser 30 is allowed to hit onto the back of the probe 10, and reflected laser light is detected by a quadripartite photodiode 40. T