Thin film

特許 係属中 PROBLEM TO BE SOLVED: To provide a thin-film forming apparatus which raises the purity of emitted plasma particles, prevents contaminants from mixing and improves the controllability of ion concentration, and to provide a ZnO-based thin film formed that uses the apparatus. ; SOLUTION: A high-frequency coil 2 is wound around the outer periphery of a hollow discharge tube 1, while the terminals of the high-frequency coil 2 are connected to a high-frequency power source.