Manufacturing of electronic device

特許 権利維持 A manufacturing system for manufacturing an electronic device through manufacturing steps comprises a manufacturing line adapted for manufacturing an electronic device and including manufacturing apparatuses for performing processings corresponding to the manufacturing steps, a manufacturing controller for allowing the manufacturing line to manufacture a wafer having a test circuit including transistors, a measurement unit for measuring the electric characteristics of each of the transistors included in the test circuit, an identifier for identifying a manufacturing step having caused a failure among the manufacturing steps according to the distribution of transistors having electric characteristics not satisfying predetermined criteria on the wafer, and a setting changer for changing the setting of the manufacturing apparatus performing the processing for the failed manufacturing step.