Impurity doping

特許 係属中 PROBLEM TO BE SOLVED: To dope impurities to a semiconductor material formed of a deposition film such as an impurity spin on a glass film at a low temperature highly efficiently. ; SOLUTION: A solution prepared by adding a photo acid generator to a solution including dopant impurities is adhered to a base material surface having a semiconductor material for forming an optically active impurity spin on glass film.