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特許 係属中 PROBLEM TO BE SOLVED: To provide a radical generator which enhances the purity of emitted plasma atoms, prevents the inclusion of impurities and enhances the controllability of ion concentration. ; SOLUTION: An outer surrounding of a discharge tube 10 is wound around by a high-frequency coil 4, and a terminal of the high-frequency coil 4 is connected to a high-frequency power source 9.
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