ZnO thin film

特許 係属中 PROBLEM TO BE SOLVED: To provide a ZnO thin film for making a flat film grow, when a ZnO thin film is to be formed on a substrate. ; SOLUTION: In Fig. (a), a ZnO thin film 2 is formed on a ZnO substrate 1. In Fig. (b), a ZnO laminate 10, which is a laminate of ZnO thin films, is formed on a ZnO substrate 1. The ZnO laminate 10 is a laminate, in which multiple ZnO semiconductor layers, including a ZnO semiconductor layer 3 and a ZnO semiconductor layer 4, are laminated.