Surface-treating apparatus

特許 係属中 Provided is a surface-treating apparatus making use of a neutral particle beam, by which a high-quality surface treatment is fundamentally conducted, and a high surface treatment rate is achieved. The surface-treating apparatus serves to conduct a surface treatment of an object to be treated, which is arranged in a vacuum treatment chamber, by a neutral particle beam, and is equipped with a light source for irradiating the object to be treated with light. In the surface-treating apparatus, the light applied to the object to be treated is preferably light including rays having a wavelength of 380 nm or shorter.