UV light emitting element

特許 権利維持 PROBLEM TO BE SOLVED: To provide a vacuum ultraviolet light emitting element which is formed of a fluoride crystal emitting light at high luminance in the vacuum ultraviolet region and can be suitably used for photolithography, cleaning of a substrate of semiconductor or liquid crystal, sterilization, a large-capacity optical disk for next generation, medical treatment (ophthalmological treatment or DNA incision) or the like.