X-ray spectrometer

特許 権利維持 PROBLEM TO BE SOLVED: To provide a wavelength-dispersive X-ray spectrometer having short measuring time and very little sample damage. ; SOLUTION: A sample is irradiated with X rays or an electron beam controlled or restricted in such a way that the length of a side of a beam parallel to the axis connecting a sample to a detector may be converged to 300 [mu]m or less to condense fluorescent X rays or characteristic X rays generated from the sample to locations different for every wavelength through the use of the diffraction phenomenon of a curvature distribution crystal lens of which the crystal orientation is controlled perpendicularly to a cylindrical face.