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特許 係属中 PROBLEM TO BE SOLVED: To provide a mechanical pump capable of suppressing the occurrence and accumulation of reaction products and ensuring a normal operation over a long period of time. ; SOLUTION: This mechanical pump has an yttria (Y<SB>2</SB>O<SB>3</SB>) film on the surface of a gas contact part exposed to gas inside a casing a3 which should be exhausted.
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