公式タイトルと情報はIP Exchange PlusとPremiumのユーザーのみが利用可能です。
特許 権利維持 In a shower plate 31 having a plurality of pipes, the pipe 31A3 includes an outward-convex porous member 44 that is arranged along the pipe and that has a predetermined porosity with respect to a raw material gas and a metal member 41 faced to the porous member and defining a raw material gas flow path 43 in combination with the porous member.
追加情報の詳細を見るにはIP Exchange PlusまたはIP Exchange Premiumアカウントにアップグレードする必要があります
