Vacuum UV-emitting element

特許 係属中 PROBLEM TO BE SOLVED: To provide a new vacuum ultraviolet light-emitting element material which emits light with high brightness, for example, in the vacuum ultraviolet region of emission wavelengths of <=200 nm, and is suitably used for photolithography, sterilization, a large-capacity optical disk for next generation and medical treatment (ophthalmological treatment or DNA incision) or the like.