Diamond film coating

特許 権利維持 PROBLEM TO BE SOLVED: To provide an apparatus for uniformly and efficiently coating a sample in a three-dimensional shape with a vapor phase synthesized diamond film. SOLUTION: The coating method for a vapor phase diamond film by a hot filament method comprises: disposing inside a coating apparatus, a filament 1 for heating, a sample 4 to be coated near the filament 1 for heating, and an upper electrode and a lower electrode for heating the filament;