Multilayer structure

特許 係属中 PROBLEM TO BE SOLVED: To provide a multilayer structure and its manufacturing method capable of stably manufacturing at simple process. ; SOLUTION: On a substrate 1, the multilayer structure comprises a surface layer 3 wherein at least one atom layer of alkaline metal atom is laminated via a buried layer 2 wherein at least one atom layer of alkaline metal atom on the substrate is substituted, and its work function [phi] is set at 3 eV or less.