Micromirror

特許 権利維持 PROBLEM TO BE SOLVED: To provide a micromirror capable of dual axis scanning in which a pattern formation on torsion bars is unnecessary. SOLUTION: The micromirror includes: a pair of first torsion bars formed to project from a reflecting mirror; a first supporting frame which supports the reflecting mirror rockably around a first axis via the pair of first torsion bars; a pair of second torsion bars so formed to project from the first supporting frame and intersect with the pair of the first torsion bars at right angle;