公式タイトルと情報はIP Exchange PlusとPremiumのユーザーのみが利用可能です。
特許 権利維持 A two-beam interference lithography system offers large-area nanopatterning with tunability of pattern periodicities. The tunable feature is achieved by placing two rotatable mirrors in the two expanded beam paths which can conveniently be regulated for the designed pattern periodicities.