Patterning microfeatures

特許 係属中 It is often desirable to pattern a film into distinct features or to form openings (or vias) in some of the layers. These features are on the micrometer or nanometer scale and the patterning technology is what defines microfabrication. The patterning technique typically uses a 'mask' to define portions of the film which will be removed. Examples of patterning techniques include: Photolithography Shadow Masking