Microresonator

特許 権利維持 Depending upon the type of resonator, the fabrication process is either done in a specialized MEMS fab or a CMOS foundry. The manufacturing process varies with resonator and encapsulation design, but in general the resonator structures are lithographically patterned and plasma-etched in or on silicon wafers. All commercially MEMS oscillators are built from poly or single crystal silicon.