EUV lithography

特許 係属中 Lithography (from Greek λίθος, lithos, "stone" and γράφειν, graphein, "to write") is a method of printing originally based on the principle that oil and water do not mix.[1] Printing is from a stone (lithographic limestone) or a metal plate with a smooth surface. It was invented in 1796 by German author and acExtreme ultraviolet lithography (also known as EUV or EUVL) is a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.tor Alois Senefelder as a cheap method of publishing theatrical works.[2][3] Lithography can be used to print text or artwork onto paper or other suitable material.