Mass flow controller

特許 係属中 A mass flow controller (MFC) is a device used to measure and control the flow of fluids and gases. A mass flow controller is designed and calibrated to control a specific type of fluid or gas at a particular range of flow rates. The MFC can be given a setpoint from 0 to 100% of its full scale range but is typically operated in the 10 to 90% of full scale where the best accuracy is achieved. The device will then control the rate of flow to the given setpoint.