Near-field scanning optical microscope

特許 権利維持 Near-field scanning optical microscopy (NSOM/SNOM) is a microscopy technique for nanostructure investigation that breaks the far field resolution limit by exploiting the properties of evanescent waves. This is done by placing the detector very close (distance much smaller than wavelength λ) to the specimen surface. This allows for the surface inspection with high spatial, spectral and temporal resolving power.