Cyclotron resonance ion source

特許 係属中 The ECR ion source makes use of the electron cyclotron resonance to ionize a plasma. Microwaves are injected into a volume, at the frequency corresponding to the electron cyclotron resonance defined by a magnetic field applied to a region inside the volume. The volume contains a low pressure gas. The alternating electric field of the microwaves being synchronous with the gyration period of the free electrons of the gas, it increases their perpendicular kinetic energy.