公式タイトルと情報はIP Exchange PlusとPremiumのユーザーのみが利用可能です。
特許 係属中 Photolithography, also termed optical lithography or UV lithography, is a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate.