Microcantilevers

特許 権利維持 Cantilevered beams are the most ubiquitous structures in the field of microelectromechanical systems (MEMS). An early example of a MEMS cantilever is the Resonistor,[5][6] an electromechanical monolithic resonator. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si3N4), or polymers. The fabrication process typically involves undercutting the cantilever structure to release it, often with an anisotropic wet or dry etching technique.