Titanium oxide thin film

特許 係属中 PROBLEM TO BE SOLVED: To deposit a partially nitrided titanium oxide thin film by a PLD (pulsed laser deposition) method. ; SOLUTION: A titanium oxide sintered material is irradiated with pulsed laser light in an atmosphere including at least a nitrogen element at constant gas pressure so as to form a partially nitrided titanium oxide thin film on a substrate placed at a position opposing to the titanium oxide material.