Probe centering

Patent Pending PROBLEM TO BE SOLVED: To provide a method for centering a probe that is capable of reducing influence of a shape error and an installation error of an assistance sample, and centering the probe with a high accuracy in a short time while quantitatively calculating a centering error. SOLUTION: In a method for centering a probe, an assistance sample 30 with a spherical shape is placed on a rotation means 10 in such a manner that the center of the assistance sample 30 is aligned with a rotation axis 10a of the rotation means 10, and coordinates on a surface of the assistance sample 30 is measured by the probe 20.